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MKS

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MKS
REGISTERED

on 4 Dec 2007

Last Applicant/ Owned by

MKS INSTRUMENTS INC. (A MASSACHUSETTS CORPORATION)

90 Industrial WayWilmington, Massachusetts 01887

US

Serial Number

1305358 filed on 13th Jun 2006

Registration Number

TMA702200 registered on 4th Dec 2007

Registration expiry Date

4th Dec 2032

Correspondent Address

ROBIC AGENCE PI S.E.C./ ROBIC IP AGENCY LP

630, boul. René-Lévesque Ouest20e étageMontréal

QUÉBEC

CA

H3B1S6

MKS

Trademark usage description

traps for capturing waste materials exiting from a process chamber. gas and fluid pressure valves, flanges and fittings for controlling, containing, Read More

Classification Information

Class [006]
Traps for capturing waste materials exiting from a process chamber.

Classification kind code

11

Class [007]
Gas and fluid pressure valves, flanges and fittings for controlling, containing, isolating and shutting off gas and fluid flow; direct current generators; power generators for converting energy from chemical gas reactions; liquid delivery system composed primarily of a pump, vaporizer, and controller for vaporizing a liquid into a gas and delivering the gas to a process chamber; DC power generators.

Classification kind code

11

Class [009]
Sensors, gauges, switches and meters for measurement and control of fluid pressure, vacuum and gas flow; electrical instrumentation for measurement and control of fluid pressure, vacuum and gas flow, namely, display panels, power supply modules and digital readout displays; residual gas analyzers; monitors for detecting gas compositions within a process chamber; mass spectrometers; electrical analog-digital interface adapters; computer hardware used for measurement and control of fluid pressure, vacuum and gas flow; radio frequency, microwave power supplies and generators; gas sticks composed of mass flow controllers, pressure transducers, control valves, isolation valves and volumes; helium leak detectors; gas detectors and analyzers; calibration equipment for monitoring and adjusting gas and fluid pressure and flow; computer hardware and software for measuring the transmission, reflectivity, optical density and thickness of thin metal films, and for providing topographical images of the same; software for operating optical spectrometers; software for operating mass spectrometers; computer hardware and software for determining the presence and measurement of residual contaminants; micro-processor based data communication devices for communicating between quadrapole gas or fluid mass analyzers for and a computer; radio wave and microwave plasma generators; controllers, computer hardware and software for use in monitoring and controlling fluid, vacuum and gas generation, flow, detection and analysis; controllers, computer hardware and software for use in monitoring and controlling fluid, vacuum and gas delivery devices, namely, electrical, plasma, radio wave and microwave transmitters, amplifiers and conduits; radio frequency amplifiers and radio frequency power generators.

Classification kind code

11

Class [011]
Gas filters and purifiers; heaters; reactive gas generators including remote plasma sources and ozone generators.

Classification kind code

11

Mark Details

Serial Number

1305358

Mark Type

Trademark

Legal History

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Action TakenStatus
Submitted for opposition 50
on 12th Oct 2007		Allowed
Submitted for opposition 51
on 12th Oct 2007		Allowance Notice Sent
Submitted for opposition 42
on 25th Jul 2007		Advertised
Submitted for opposition 15
on 13th Jun 2007		Correspondence Created
Submitted for opposition 26
on 7th Jun 2007		Approved
Submitted for opposition 22
on 2th Jan 2007		Search Recorded
Submitted for opposition 20
on 2th Jan 2007		Examiner's First Report
Submitted for opposition 1
on 14th Jun 2006		Created
Submitted for opposition 31
on 14th Jun 2006		Formalized
Submitted for opposition 30
on 13th Jun 2006		Filed